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Plasma System Engineering

Code: ELEC391

Credits: 7.5

Semester: Semester 1

The module introduces to the students the basic concepts of electrical plasmas and how they are used in industry. It concentrates on the engineering principles behind plasma technology rather than the physics of the discharge, however some mathematical approaches are explored so that quantification of the action of plasmas upon material surfaces can be made. The module explains how a gas can turn into a plasma and how high energy ions in the plasma can be generated to process a substrate, such as silicon wafer in micro-electronics fabrication. The module is taught by a mixture of power points notes and chalk and talk. There are a number of question sheets given out to help the students understand the basis plasma-material processes. On completion, students will understand how plasmas are used in industry, they will have an appreciation of some aspects of simple design and how plasmas can be configured for the next generation of fusion power stations.